13–15 Sept 2023
Montanuniversität Leoben
Europe/Vienna timezone

Rapid preparation of extremely large volume to access deeply buried structures with the laser FIB-SEM

15 Sept 2023, 12:05
20m
Kuppelwieser Hörsaal

Kuppelwieser Hörsaal

Oral Presentation Mikroskopische Methoden für die Material- und Prozessentwicklung Digitale Bildverarbeitung und Analytik

Speaker

Olena Vertsanova (Carl Zeiss Microscopy GmbH)

Description

Modern electron microscopy makes it possible to study the three-dimensional structure of a sample in a multiscale range. X-ray microscopy gives us the ability to detect areas of interest hidden under the surface, but the question remains, how can we get to this area and get the information of region of interest. Modern FIB microscopes are brilliant tools, but the cross sectioning can take hours or even days. Fs laser FIB technology solves this problem much faster and make it possible to get access to deeply buried structures in minutes. The laser adds additional capabilities to the FIB-SEM, expanding its already broad application space.
By means of fs laser ablation large volumes of material can be removed from a sample very rapidly with in most cases negligible sample damage. Thus, access can be gained to regions of interest deeply buried in the sample for their subsequent FIB-SEM analysis.
In this talk, we present applications of laser-FIB include the TEM micro- and macro-lamella preparation, APT sample preparation, fabrication of micromechanical devices for materials testing, the preparation of surfaces for EBSD analysis, and the production of pillar-shaped samples for the synchrotron or X-ray microscope.

Authors

Olena Vertsanova (Carl Zeiss Microscopy GmbH) Dr Benjamin Tordoff (Carl Zeiss Microscopy GmbH)

Presentation materials

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