EUROPEAN CONGRESS AND EXHIBITION ON ADVANCED MATERIALS AND PROCESSES - EUROMAT 2021

In this paper, we present two approaches to synthesize nanostructured metal oxide semiconductors in a form of multi-layer thin films later assembled as a conductometric gas-sensors. First approach produces a combination of thin solid film of tungsten trioxide (WO3) with nanoclusters of cupric oxide (CuO) prepared by magnetron-based gas aggregation cluster source (GAS). Second method is a two-step reactive magnetron sputtering forming a nanostructured copper tungstate (CuWO4) on-top of a WO3 film. Both methods lead to synthesis of nanosized hetero-junctions. These greatly improves the sensorial response to hydrogen in comparison with a WO3 thin film alone.