Speaker
Description
Among the few direct-write techniques for freestanding 3D-objects at the nanoscale, 3D-nanoprinting via Focused Electron Beam Induced Deposition (3D-FEBID) has made significant progress in recent years [1]. This additive manufacturing method, in which a gaseous precursor is locally immobilize upon irradiation with a focused electron beam, is capable of depositing complex 3D nanoarchitectures consisting of individual nanowires with wire diameters down to 20 nm. The increasing availability of different precursor types continuously expands the functionalities of FEBID based structures from electrically to magnetically to optically active purposes. Together with direct-write 3D capability on the nanoscale, flexibility in terms of geometry design and substrate material/morphology, 3D-FEBID paves the way for novel application concepts (e.g. for scanning probe microscopy[2]). For that, detailed knowledge of the constituent wire dimensions is required, as these ultimately determine many physical properties (e.g. electrical and thermal conductivity, stiffness, optical properties). After highlighting the unique benefits by 3D-FEBID, we show in this contribution that wire thickness and width strongly depend on the wire angle. To explain the trends found as a function of primary beam energy, beam current, and angle we consider the dominant growth mechanisms, separated into electron-, precursor-, and geometric effects [3]. Finally, we discuss approaches that allow arbitrary tuning of wire dimensions, as needed for the goal of 3D-nanogeometries with defined physical properties for applications.
[1] Winkler et al., J. Appl. Phys. 2019
[2] Plank et al. Micromachines 2020
[3] Winkler et al., Addit. Manuf. 2021
| Speaker Country | Austria |
|---|