Speaker
Description
Functional coatings (thin films and multilayers) are widely applied in technological applications due to the tunability of their mechanical, thermal, optical and electro-magnetical properties. An important factor which affects their reliability in applications, is the intrinsic stress generated during the deposition process, which can determine unwanted effects as cracking, peeling, and as well as a inferior thermal instability; contrariwise, in some cases stress can strengthen the mechanical properties. For these reasons, understanding stress generation and evolution mechanisms during thin films and multilayer fabrication and post high temperature processing, is paramount to achieve stress tailoring and engineer-ing for specific applications. This work focuses on Cu/W nanomultilayer (NML) systems; the high number of interfaces in such NML systems was found to govern their final stress state and thermal stability [1,2]. Cu/W NMLs with variable individual layer thicknesses are produced by DC magnetron sputtering, while in-situ monitoring the substrate curvature during growth by a multi-beam optical stress sensor (MOSS) technique. In-situ stress data are acquired at different deposition conditions (pressure, DC power, temperature): 1. to rationalize the stress development inside the NML systems, 2. to correlate it with the films microstructure and stability at high temperatures and 3. to control the desired final stress state. The curvature data will be compared to the ex-situ characterization performed by XRD.
[1] F. Moszner, C. Cancellieri, M. Chiodi, S. Yoon, D. Ariosa, J. Janczak-Rusch, L.P.H. Jeurgens, Thermal stability of Cu/W nano-multilayers, Acta Mater. 107 (2016) 345–353.
[2] A. V. Druzhinin, D. Ariosa, S. Siol, N. Ott, B. B. Straumal, J. Janczak-Rusch, L. P. H. Jeurgens, and C. Cancellieri, Effect of the individual layer thickness on the transformation of Cu/W nano-multilayers into nanocomposites, Materialia 7, 100400 (2019).
| Speaker Country | Switzerland |
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