EUROPEAN CONGRESS AND EXHIBITION ON ADVANCED MATERIALS AND PROCESSES - EUROMAT 2021

Metal-organic-frameworks (MOFs) are an emerging porous materials class with many applications ranging from catalysis, chemical species separation to electronics. To date, the key synthesis routes for MOFs are predominantly wet chemistry based, resulting in either isolated MOF micro- and nanocrystals or in so-called surface-coordinated MOFs via layer-by-layer assembly. For conformal coating of complex three-dimensional nanostructures and also controlled core-shell structuring, the use of vapour-phase based synthesis routes for MOFs has promising advantages but has in comparison to wet synthesis to date only been little investigated. We here employ a state-of-the-art atomic-layer-deposition (ALD) system to grow ultra-thin MOF films. We screen the deposition parameter space in terms of precursor feeding protocols, growth temperatures and post-deposition-treatments with respect to structural and chemical properties of the resulting MOF films.