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EUROPEAN CONGRESS AND EXHIBITION ON ADVANCED MATERIALS AND PROCESSES - EUROMAT 2021

Name: EUROPEAN CONGRESS AND EXHIBITION ON ADVANCED MATERIALS AND PROCESSES - EUROMAT 2021
Start: 2021-09-13T08:00:00+02:00
End: 2021-09-17T18:40:00+02:00
Location: Virtual

13–17 Sept 2021 Virtual Conference

Virtual

Europe/Vienna timezone

Thank you very much for your participation!

Conference Secretary

Details for Andreas Zienert

Affiliation: Center for Microtechnologies, Chemnitz University of Technology, Chemnitz, Germany

Coupled CFD and surface chemistry modeling of a Si epitaxy process in a single wafer reactor (Highlight)

EUROPEAN CONGRESS AND EXHIBITION ON ADVANCED MATERIALS AND PROCESSES - EUROMAT 2021

Conference Secretary

Author in the following contribution